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Coatings | Free Full-Text | A Study on Solution-Processed Y2O3 Films Modified by Atomic La…
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Growth per cycle of Al2O3 thin films as a function of substrat…
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Al2O3 Thick / Thin Film Ceramic Substrates …
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Marché européen de la déposition de la couche atomique (ALD) – Ken Research: In…
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Summary of the ALD Al2O3 thin film deposition parameters and the film... | Download Scientifi…
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Chapter 9 Thin film deposition 1 2 3

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